| 1. | Furthermore , the etching rate , roughness versus incident laser fluences and pulse number are investigated theoretically and experimentally in detail by 3d surface analyzer . then a new priciple of pmma etched by excimer laser is given : the process is the interaction result of photodecomposition ,
随后应用总结出的优化加工参数在该材料上刻蚀出了宽104 m ,深56 m ,矩形度高达80 % ,底面光滑的20个循环的pcr微流控芯片。 |
